Fan Filter Unit (FFU)
FFU (Fan Filter Unit) is a type of air conditioner located on the ceiling surface during construction and is a small unit acting as an air blower inside the clean room.
Depending on the cleanliness of the clean room, the number of installations can be adjusted and an active change is made following the changes in clean room Lay Out.
Equipment Fan Filter Unit (EFU)
EFU is a slim type product for the Mini Clean-environment System of production equipment and is installed in a clean room in a similar way as other clean equipment such as semiconductor and LCD equipment.